Gyroscope

ABSTRACT

To provide a compact and high performance gyroscope. 
     A gyroscope ( 10 ) comprises an outer frame ( 11 ); an inner frame ( 12 ) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses ( 15 ) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions ( 13 ) which connect the outer frame and the inner frame; a plurality of inner support suspensions ( 14 ) which connect the inner frame and each of the proof masses; actuators ( 16 ) for accelerating each of the proof masses; and detectors ( 17 ) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present patent application is a divisional application of U.S.patent application Ser. No. 11/914,127, filed Nov. 9, 2007, entitled“GYROSCOPE,” which is a U.S. National Phase Application under 35 U.S.C.§371 of International Application No. PCT/JP2005/009424, filed on May24, 2005.

FIELD

The present invention relates to gyroscopes, and more specifically,relates to compact and high performance gyroscopes and a method formaking the same.

BACKGROUND

In recent years, compact and high performance gyroscopes have beendesired for spacecrafts operated in space.

Compact gyroscopes are also desired for navigation systems forautomobiles, game machines and cameras.

Coriolis forces, used in gyroscopes, increase when mass and speed ofproof masses increase. If smaller proof masses are used to downsizegyroscopes, masses decrease. In order to induce a large Coriolis forcewith small masses, proof masses have to be moved rapidly. However, thevelocity of a proof mass is limited.

Therefore, the prior art gyroscope has the defect that if the gyroscopeis downsized, sensitivity and stability are decreased.

FIG. 1 is a figure explaining the Coriolis force. A proof mass 5 havinga mass m is connected to a support frame 2 by a support suspension 4.The support suspension 4 is shown by a coil spring. When the proof mass5 is driven in x-direction at a speed v, and this device is rotated atangular velocity Ω, a Coriolis force F_(cori) in y-direction is induced.

F_(cori)=2mΩv  (1)

As shown in equation (1), to induce a large Coriolis force, it isnecessary to increase the mass m and velocity v of the proof mass 5.

When the proof mass 5 is driven at amplitude x₀ and angular frequency ω,the displacement of the proof mass 5 is shown by the equation (2).

x=x ₀ sin(ωt)  (2)

The displacement of the proof mass 5 is differentiated by time, then avelocity v(t) is obtained.

V(t)=dx/dt=x ₀ω cos(ωt)  (3)

Thus, the Coriolis force can be shown as follows.

F _(cori)=2mΩx ₀ω cos(ωt)  (4)

When only amplitude is considered,

F_(cori)=2mΩx₀ω  (5)

Thus, to induce a large Coriolis force, it is necessary to increase themass m of the proof mass 5, and increase the amplitude and frequency.

In a mechanical oscillation system, the upper limit of driving frequencyis resonance frequency of the system. At resonance frequency, it isexpected that the amplitude is increased by factor Q. However, thedistance that the mass can be moved is limited by the structure of thesystem, and thus the amplitude does not increase so much.

When the proof mass is driven at the resonance frequency (factor Q), theamplitude is sensitive to fluctuation of frequency, and thus stabilityis not obtained. Thus, in order to obtain stability, it is better todrive the proof mass at a frequency different from the resonancefrequency.

It is assumed that the driving frequency is set to the resonancefrequency. It is assumed that a model of a spring-mass system with alumped constant is used, and spring constant of the suspension 4 is k.Then, the angular frequency ω_(res) is shown as follows.

ω_(res)=√(k/m)  (6)

The equation (6) is assigned to the equation (5).

F _(cori)=2mΩx ₀√(k/m)=2Ωx ₀√(mk)  (7)

Thus, the Coriolis force is proportional to the amplitude x₀, and isproportional to square root of spring constant k and mass m.

In the case of a micro gyroscope including a proof mass 5 with smallmass m, when driving force of an actuator for driving the proof mass 5increases, and the amplitude x₀ of the proof mass 5 increases, then alarge Coriolis force is induced. That is, the sensitivity of thegyroscope increases. However, the amplitude x₀ is limited by theconstruction of the gyroscope.

Further, like the case when mass m is increased, when spring constant kis increased, a large Coriolis force is induced.

Prior art Patent Publication 1 discloses an oscillating gyroscope whichis formed integrally by etching a silicon substrate.

This gyroscope has one oscillator, and a small Coriolis force isinduced. Further, this gyroscope is made from one silicon substrate, andthus it is difficult to make a multilayer structure.

Therefore, a more compact and high performance gyroscope is desired, anda fabrication method for making such gyroscope is also desired.

-   Patent Publication 1: JP H05-209754

SUMMARY

An object of the present invention is to provide a compact and highperformance gyroscope. Another object of the present invention is toprovide a method for manufacturing such a gyroscope using a micromachining technique.

The gyroscope of the present invention has a plurality of proof masses,each proof mass is oscillated synchronously, and Coriolis forces inducedon each of the proof masses are summed up or combined, thereby obtaininga Coriolis force larger than that obtained by oscillating one proof massat high speed.

In one aspect of the present invention, a gyroscope comprises:

an outer frame;

an inner frame positioned inside said outer frame;

a plurality of proof masses positioned inside said inner frame;

a plurality of outer support suspensions which connect said outer frameand said inner frame and which support said inner frame so that it ismovable in one reciprocating direction against said outer frame;

a plurality of inner support suspensions which connect said inner frameand each of said proof masses and which support said proof masses sothat they are movable in the direction normal to said one reciprocatingdirection against said inner frame;

actuators for driving each of said proof masses; and

detectors for detecting displacement of said inner frame against saidouter frame;

wherein said actuators oscillate said plurality of proof masses, andwherein Coriolis forces induced on each of said proof masses are summedup in said inner frame.

Preferably, the proof masses are oscillated synchronously.

In this aspect of the invention, Coriolis forces induced in each proofmass are summed up at the inner frame, and thus a large Coriolis forceis achieved thereby.

In another aspect of the invention, the gyroscope comprises:

an outer frame;

an inner frame positioned inside said outer frame;

a plurality of proof masses positioned on a circle around the rotationalaxis of said inner frame;

a plurality of outer support suspensions which connect said outer frameand said inner frame and which support said inner frame so that it ispivotable around said rotational axis;

a plurality of inner support suspensions which connect said inner frameand each of said proof masses and which support said proof masses sothat they are movable in the radial direction of said inner frame;

actuators for driving each of said proof masses; and

detectors for detecting displacement of said inner frame against saidouter frame;

wherein said actuators oscillate said plurality of proof massessynchronously, and wherein Coriolis forces induced on each of said proofmasses are summed up in said inner frame, to generate a torsion torquein said inner frame.

In this aspect of the invention, Coriolis forces induced in each proofmass are summed up at the inner frame, large torque being achievedthereby.

Preferably, a gyroscope comprises a first layer and a second layer; andsaid outer frame, said inner frame and said proof masses are positionedin both of said first layer and second layer; and

said outer supporting suspensions are positioned in one of said firstlayer and second layer, and said inner supporting suspensions arepositioned in one of said first layer and second layer.

In this embodiment, the first layer may have a structure that isdifferent from that of the second layer. Thus, it is possible to designthe layers more freely than in the prior art.

Another aspect of the invention is a method for making a gyroscope whichcomprises: an outer frame, an inner frame, proof masses, outer supportsuspensions which connect said outer frame and said inner frame, andinner support suspensions which connect said inner frame and each ofsaid proof masses. Said gyroscope is made integrally from an SOI(Silicon on Insulator) substrate which includes a silicon oxide film, afirst silicon layer on one side of said silicon oxide film and a secondsilicon layer on the other side thereof.

The method comprising steps of:

(a) depositing a silicone oxide film on a first surface of said SOIsubstrate and patterning said silicone oxide film,

depositing an aluminum layer on said silicone oxide film and patterningsaid aluminum layer,

depositing an aluminum layer on a second surface of said SOI substrateand patterning said aluminum layer;

(b) etching portions that are not masked by said aluminum layer fromsaid first surface, thereby forming a structure of the first siliconelayer;(c) removing said aluminum layer from said first surface to expose saidsilicone oxide film, and then etching from said first surface again,thus etching portions that are not masked by said silicone oxide film,thereby forming the structure of said first silicone layer so thatmovable portions are spaced from an underlying surface;(d) etching from said second surface, thus etching portions that are notmasked by said aluminum layer, thereby forming a structure of the secondsilicone layer; and(e) removing said silicone oxide film on said SOI substrate bysacrificial etching, thus separating said structures of said first andsecond silicone layers from said outer frame.

By this method, the SOI substrate which includes silicon oxide film andtwo silicon layers on both sides thereof is processed by a micromachining technique, and thus the components of the gyroscope can bearranged in two layers.

Preferably, the steps of (b), (c) and (d) are conducted by deep-reactiveion etching (DRIE) method.

A compact gyroscope having high performance and stability is obtained bythe present invention.

By using a plurality of proof masses, dispersion of each proof mass isaveraged, and thus a gyroscope having stable performance is obtained.

Further, because such a gyroscope is easy to manufacture, it is possibleto make inexpensively.

BRIEF DESCRIPTIONS OF THE DRAWINGS

FIG. 1—A figure explaining Coriolis forces.

FIG. 2—A figure explaining Coriolis forces of the gyroscope which hastwo proof masses.

FIG. 3—A figure explaining Coriolis forces of the gyroscope which hastwo proof masses.

FIG. 4—A schematic plane view of the gyroscope having four proof massesaccording to the first embodiment of the present invention.

FIG. 5—A figure of the gyroscope in which two proof masses areoscillated in an anti-phase.

FIG. 6—A figure of the gyroscope in which two proof masses arepositioned around the rotational axis and oscillated in a radialdirection in an anti-phase.

FIG. 7—A figure of the gyroscope in which four proof masses arepositioned around the rotational axis and oscillated in a radialdirection in-phase.

FIG. 8—A schematic plane view of the gyroscope having proof massespositioned in a circle according to the second embodiment of the presentinvention.

FIG. 9—Schematic plane views and cross sectional views showing steps formaking the gyroscope of the embodiments of the present invention.

FIG. 10—A perspective view showing the structure of the gyroscope madefrom an SOI substrate.

FIG. 11—A cross sectional view of an embodiment in which the proofmasses have metal layers.

EXPLANATION OF NUMERALS

-   -   2 support frame    -   4 support suspension    -   5 proof mass    -   8 rotational axis    -   10 gyroscope    -   11 outer frame    -   12 inner frame    -   12 a center portion    -   13 outer support suspension    -   14 inner support suspension    -   15 proof mass    -   15 a center portion    -   15 b extension portion    -   16 actuator    -   17 detector    -   17 a detecting electrode    -   18 rotational axis    -   19 anchor    -   20 gyroscope    -   21 silicon oxide layer    -   22 silicon layer    -   23 silicon layer    -   24 silicon oxide layer    -   25 aluminum layer    -   26 aluminum layer    -   27 metal    -   28 metal

DETAILED DESCRIPTION

FIG. 2 illustrates Coriolis forces of a gyroscope which has two proofmasses. A support suspension 4 is illustrated by a line. FIG. 2 (a)illustrates an initial state of proof masses 5 a,5 b, and (b)illustrates a state in which the proof masses 5 a,5 b are oscillatedin-phase and the gyroscope is rotated at angular velocity Ω. Accordingto the equation (6), if the mass of the proof masses 5 decreases, theresonance frequency increases. Thus, if the proof masse 5 is dividedinto two parts, the resonance frequency increases. By oscillating eachof the proof masses 5 a,5 b in-phase, Coriolis forces in the samedirection are induced on each of the proof masses 5 a,5 b. When theCoriolis forces induced in the two proof masses 5 a and 5 b can besummed up, a Coriolis force which is larger than that achieved bydriving one proof mass 5 is obtained.

FIG. 3 also illustrates Coriolis forces of a gyroscope which has twoproof masses. In FIG. 3, each of the proof masses 5 a,5 b is supportedby two support suspensions 4, and is movable in y-direction (up anddown), while it is not movable in x-direction (right and left). Theproof masses 5 a,5 b are oscillated in y-direction, and the gyroscope isrotated with an angular velocity Ω. Then, Coriolis forces F_(cori) inx-direction are induced on the proof masses 5 a,5 b, and Coriolis forcesare transferred to a support frame 2 via the support suspensions 4. Whentwo proof masses 5 a,5 b are oscillated in-phase, the Coriolis forcesinduced on each of the proof masses 5 a,5 b are in the same direction,and the Coriolis forces are summed up in the support frame 2.

FIG. 4 is a schematic plane view of a gyroscope 10 having four proofmasses 15 according to the first embodiment of the present invention.The gyroscope 10 is made from An SOI (Silicon on Insulator) substratewhich includes a silicon oxide film and two silicon substrates on bothsides thereof. The gyroscope 10 comprises an outer frame 11 which has asquare cross section, and an inner frame 12 which is positioned insidethe outer frame 11 and which has a square cross section. Center portions12 a of two sides in x-direction of the inner frame 12 are connected tothe insides of the outer frame 11 by two outer support suspensions 13which are parallel to y-axis. The outer support suspensions 13 are plateshaped members having thin thickness. One end of each of the outersupport suspensions 13 is connected to a corresponding inner side of theouter frame 11, and the other end of each of the outer supportsuspensions 13 is connected to a corresponding one of the centerportions 12 a of the inner frame 12, and movable only in x-direction.The length of the outer support suspensions 13 in y-direction does notchange, and the outer support suspensions 13 do not bend in z-direction.Thus, the inner frame 12 is movable in x-direction inside the outerframe 11. In a rest position, the inner frame 12 is positioned at aneutral position by the outer support suspensions 13.

The gyroscope 10 comprises four of the proof masses 15 inside the innerframe 12. Each of center portions 15 a of two sides in y-direction ofthe proof masses 15 is connected to the inside of the inner frame 12 bytwo inner support suspensions 14 which are parallel to x-axis. The innersupport suspensions 14 are plate shaped members having thin thickness.In a rest position, the proof masses 15 are positioned at a neutralposition by the inner support suspensions 14.

The gyroscope 10 comprises actuators 16 for driving each proof mass 15in y-direction. The actuator 16 is an electrostatic type actuator. Thatis, finger shaped electrodes 16 a and extension portions 15 b of theproof masses 15 are positioned alternately. The voltage is appliedbetween the electrodes 16 a and extension portions 15 b, and the proofmasses 15 are thus driven by electrostatic force. Other than this typeof actuator, a piezoelectric type or magnetic type actuator can be usedinstead. The outer frame 11 has a detector 17 for detecting displacementof the inner frame 12. The detector 17 detects a change in capacitancebetween detecting electrodes 17 a and extension portions 12 b of theinner frame 12. A piezoelectric type or magnetic type detector can beused instead of this type of detector.

Each of the proof masses 15 is oscillated in-phase in y-direction inFIG. 4. The gyroscope 10 is rotated with an angular velocity Ω aroundz-axis. Then, Coriolis forces in x-direction are induced on the proofmasses 5 a,5 b. Coriolis forces induced on each of the proof masses arein the same direction, and summed up at the inner frame 12, and acombined Coriolis force is generated at the inner frame 12. The innerframe 12 is displaced in x-direction, the displaced distance being inaccordance with the Coriolis force and spring constant of the outersupport suspension 13. By detecting the displaced distance of the innerframe 12 by the detector 17, the Coriolis force summed up at the innerframe 12 is determined.

FIG. 4 shows a gyroscope 10 having four proof masses. However, thenumber of the proof masses is not limited to four, and the number of theproof masses may be three or greater. In one embodiment of theinvention, An SOI substrate having size of 120 mm×120 mm and thicknessof 0.52 mm is used, and 7×7 proof masses are provided on the substrate.

FIG. 5 illustrates a gyroscope in which two proof masses are oscillatedin an anti-phase. A support suspension 4 is illustrated by a coilspring. In a vibratory gyroscope in which the proof masses oscillatein-phase, disturbances such as acceleration may be detected as aCoriolis force. As shown in FIG. 5, if the proof masses 5 a,5 b areoscillated in an anti-phase, Coriolis forces F_(cori1), F_(cori2) in anopposite direction are induced, and subtracting one Coriolis force fromthe other would eliminate the disturbance. However, in thisconstruction, the Coriolis forces induced on the proof masses 5 a,5 bare in opposite direction, resulting in the Coriolis forces overridingeach other, and thus they can not be summed up.

FIG. 6 illustrates a gyroscope in which two proof masses are positionedaround a rotational axis 8, and oscillated in a radial direction in ananti-phase. The support suspension 4 is shown by a line. The Coriolisforces F_(cori) induced on two proof masses 5 a,5 b are in an oppositedirection, and generate torque T in the same direction around therotational axis 8 of the support frame 2. That is, the Coriolis forcescan be summed up as a torque T. Further, proof masses 5 a,5 b areoscillated in an anti-phase, thus can resist a disturbance.

FIG. 7 illustrates a gyroscope in which a plurality of proof masses 5(four proof masses in FIG. 7) are positioned around the rotational axis8, and are oscillated in a radial direction in-phase. The supportsuspensions 4 are shown by coil springs. The proof masses 5 areoscillated synchronously, i.e., all the proof masses move outwardly in aradial direction at the same time, and move inwardly at the same time.When a support frame 2 is rotated with angular velocity Ω, Coriolisforces F_(cori) induced on each proof mass 5 operate to rotate thesupport frame 2 around the rotational axis 8. The total torque T_(total)induced on each proof mass 5 is proportional to the number of the proofmasses, i.e., total mass. The total torque T_(total) is converted todisplacement of the support frame 2, and then converted to a change ofcapacitance by a detector (not shown), and thus a Coriolis force can bedetermined.

A plurality of proof masses are positioned on a circle and oscillated,and thus can resist a disturbance from various directions. The Coriolisforces of the proof masses can thus be summed up, resulting in highsensitivity.

FIG. 8 is a schematic plane view of a gyroscope 20 according to thesecond embodiment of the present invention. In FIG. 8, parts or portionswhich are the same as those of FIG. 4 are shown by the same referencenumerals as those in FIG. 4. As in the first embodiment, the gyroscope20 is made from an SOI substrate. The gyroscope 20 comprises an outerframe 11 which has a square cross section and anchors 19 in the fourcorners of the outer frame 11. An inner frame 12, which has a squarecross section, is positioned inside the outer frame 11. Each anchor 19and the inner frame 12 is connected by an outer support suspension 13.The outer support suspensions 13 are plate shaped members having thinthickness. One end of each of the outer support suspensions 13 isconnected to a corresponding one of each of the anchors 19, and theother end of each of the outer support suspensions 13 is connected tothe inner frame 12, and the other end is movable only in thecircumferential direction around the rotational axis 18 of the innerframe 12. The length of the outer support suspensions 13 in a radialdirection of the inner frame 12 do not change, and the outer supportsuspensions 13 do not bend in z-direction. Thus, the inner frame 12 issupported to be movable around the rotational axis 18. In a restposition, the inner frame 12 is positioned at a neutral position by theouter support suspensions 13.

Eight proof masses 15, which have the same mass, are positioned in acircle at the same interval inside the inner frame 12. Each of two endportions of the proof masses 15 in a radial direction of the inner frame12 is connected to the inside of the inner frame 12 by two inner supportsuspensions 14. The inner support suspensions 14 are plate shapedmembers having thin thickness. Each of the proof mass 15 is movable in aradial direction of the inner frame 12 in the inner frame 12. In a restposition, each of the proof mass 15 is positioned at a neutral positionby the inner support suspensions 14.

The gyroscope 20 comprises actuators 16 for driving each proof mass 15in a radial direction of the inner frame 12. The gyroscope 20 comprisesa detector 17 for detecting rotational displacement of the inner frame12 around the rotational axis 18. The principal of the actuator 16 andthat of the detector 17 are the same as those of the first embodiment ofthe present invention.

Each of the proof masses 15 is oscillated in-phase in a radial directionby actuators 16 provided for each proof mass 15. That is, all the proofmasses 15 are moved inwardly in the radial direction at the same time,and moved outwardly at the same time. The gyroscope 20 is rotated atangular velocity Ω. Coriolis forces in a circumferential direction ofthe inner frame 12 are induced on each proof mass 5 by movement of theproof mass 5. These Coriolis forces are transferred to the inner frame12 via the inner support suspensions 14, and summed up at the innerframe 12. Rotational torque around the rotational axis 18 is generated,and thus the inner frame 12 rotates in the circumferential directionaround the rotational axis 18 against the outer support frame 13. Therotational displacement of the inner frame 12 is detected by a detector17, and thus a Coriolis force is determined.

FIG. 8 shows the gyroscope 20 having eight proof masses. However, thenumber of the proof masses is not limited to eight. In one embodiment ofthe invention, an SOI substrate having a size of 120 mm×120 mm andthickness of 0.52 mm is used, and 16 proof masses are provided in acircle on the substrate.

In a gyroscope with one proof mass, when mass m of the proof massincreases, the Coriolis force increases proportional to mass m in theorder of ½. On the other hand, the distance x₀ that the proof mass movesis limited by the construction of the gyroscope, and thus the Coriolisforce is also limited.

Each proof mass of the gyroscope with a plurality of proof masses in thepresent invention has a small mass. In this case, the Coriolis forceinduced on the proof masses is proportional to the number of the proofmasses, i.e., total mass. Thus, the gyroscope with a plurality of proofmasses has an advantage compared with the gyroscope having one largeproof mass.

Further, when a lot of proof masses are disposed, fluctuation and noiseare averaged, and thus a disturbance can be resisted. Because thegyroscope has a lot of proof masses, even if one proof mass has adefect, the gyroscope can operate, and thus it has high reliability.

FIG. 9 shows steps for making the gyroscopes 10,20 of the embodiments ofthe present invention, the figures on the left side being plane viewsand the figures on the right side being cross sectional views along A-Aline of the figures on the left side. In FIG. 9, the inner frame 12, theproof mass 15 and the inner support suspensions 14 are shown, while theouter frame 11 and the outer support suspensions 13 are not shown. Theouter frame 11 and the outer support suspensions 13 can be formed at thesame time as the inner frame 12 and the inner support suspensions 14 areformed.

(a) First, an SOI substrate is prepared. The SOI substrate comprises asilicon layer 22 on an upper side of a silicon oxide film 21 and asilicon layer 23 on a lower side thereof. In the following explanation,the two sides of the SOI substrate are named an upper side (a secondside) and a lower side (a first side) in order to distinguish each side.

A silicon oxide film 24 is deposited on the lower side of the SOIsubstrate, and then is patterned according to a desired form using aphoto-lithography technique. An aluminum layer 25 is deposited on thesilicon oxide film 24, and then is patterned according to a desired formusing a photo-lithography technique.

An aluminum layer 26 is deposited on the upper side of the SOIsubstrate, and then is patterned according to a desired form using aphoto-lithography technique.

(b) Portions that are not masked by the aluminum layer 25 are etchedfrom the lower side by deep Reactive Ion Etching (RIE), and thus astructure of the lower layer is formed in the lower silicone layer 23(handling layer, first layer) of the SOI substrate. The structure of thelower layer includes lower portion of the proof mass 15, the inner frame12, and the inner support suspension 14. In this step, the silicon oxidefilm 21 (box layer) works as an etching stop layer, and thus the siliconlayer 22 on the upper side of the silicon oxide film 21 is not etched.

(c) The aluminum layer 25 (mask) on the lower side is removed, and thusthe silicone oxide film 24 is exposed. Then, the SOI substrate is etchedby RIE from the lower side again, and thus the portions that are notmasked by the silicone oxide film 24 are etched. In this step, movableportions such as the proof mass 15 and the inner support suspensions 14are formed so that their lower sides are spaced from an underlyingsurface.

(d) The upper side of the substrate is etched by deep RIE, and thus theportions that are not masked by the aluminum layer 26 are etched,thereby the upper portion of the proof mass 55 and the inner frame 12 (astructure of the upper layer) are formed in the upper silicone layer 22(second layer) of the SOI substrate. Although it not shown, the actuator16 and the detector 17 can be formed in the upper silicone layer in thisstep.

(e) The silicone oxide film 21 of the SOI substrate is etched away usingsacrificial etching, and thus movable portions such as the proof mass15, the inner frame 12 and the inner support suspension 14 are separatedfrom the outer frame 11. By this step, the movable portions can bemoved.

FIG. 10 is a perspective view showing the structure of the gyroscopemade from the SOI substrate. In FIG. 10, the inner frame 12, the proofmass 15 and the inner support suspensions 14 are shown, while the outerframe 11 and the outer support suspensions 13 are not shown. FIG. 10 (a)shows a prior art gyroscope in which the structure is formed only in theupper silicon layer. In the prior art gyroscope, the structure is notformed in the lower silicon layer (handling layer).

In the present invention, the structure is formed in the upper siliconlayer and lower silicone layer. FIG. 10 (b) shows the structure in whichthe proof mass 15 is formed in both the upper and lower silicone layers22,23, and the inner support suspensions 14 are formed in the uppersilicone layer 22. FIG. 10 (c) shows the structure in which the proofmass 15 is formed in both the upper and lower silicone layers 22,23, andthe inner support suspensions 14 are formed in the lower silicone layer23.

In this way, the proof mass 15 is formed in the upper and lower siliconlayers 22,23, and thus the mass of the proof mass 15 is increased.Further, the inner frame 12 is formed in both the upper and lowersilicon layers 22,23, and thus the strength of the inner frame 12 isincreased. The inner support suspensions 14 can be formed in one of theupper and lower silicon layers 22,23, and thus restrictions on designare decreased.

Further, there is the silicon oxide layer 21, which works as aninsulating layer, between the upper and lower silicon layers. Thus theupper silicon layer 22 and the lower silicon layer 23 are isolated fromeach other, and thus the structure can have a complicated wiring.

FIG. 11 shows a cross sectional view of an embodiment in which the proofmass has metal layers. FIG. 11 (a) shows that a metal 27 is embedded inthe proof mass by a method such as plating. FIG. 11 (b) shows that ametal 28 having high gravity, such as lead or tin, is applied to theproof mass. In this way, the mass of the proof mass is increased toattain a large Coriolis force.

INDUSTRIAL APPLICABILITY

According to the present invention, a compact and high performancegyroscope is obtained. Thus, a compact and high precision attitudecontrol system is realized, which can be used in a probe in space. Thegyroscope can also be used in an anti blurring device for a camera andin sensors for game machines.

1-3. (canceled)
 4. A method of making a gyroscope, said gyroscopecomprising an outer frame, an inner frame, proof masses, outer supportsuspensions which connect said outer frame and said inner frame, andinner support suspensions which connect said inner frame and each ofsaid proof masses, said gyroscope being made integrally from an SOI(Silicon on Insulator) substrate which includes a silicon oxide film, afirst silicon layer on one side of said silicon oxide film and a secondsilicon layer on the other side thereof, the method comprising: (a)depositing a silicone oxide film on a first surface of said SOIsubstrate and patterning said silicone oxide film, depositing analuminum layer on said silicone oxide film and patterning said aluminumlayer, depositing an aluminum layer on a second surface of said SOIsubstrate and patterning said aluminum layer; (b) etching portions thatare not masked by said aluminum layer from said first surface, therebyforming a structure of the first silicone layer; (c) removing saidaluminum layer from said first surface to expose said silicone oxidefilm, and then etching from said first surface again, thus etchingportions that are not masked by said silicone oxide film, therebyforming the structure of said first silicone layer so that movableportions are spaced from an underlying surface; (d) etching from saidsecond surface, thus etching portions that are not masked by saidaluminum layer, thereby forming a structure of the second siliconelayer; and (e) removing said silicone oxide film on said SOI substrateby sacrificial etching, thus separating said structures of said firstand second silicone layers from said outer frame.
 5. A method for makinga gyroscope according to claim 4; wherein operations (b), (c) and (d)are conducted by a deep-reactive ion etching (DRIE) method.